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The characterization of capacitive micromachined ultrasonic transducers in air
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UNSPECIFIED (2002) The characterization of capacitive micromachined ultrasonic transducers in air. In: 1st Ultrasonics International Conference, DELFT, NETHERLANDS, JUL 03-05, 2001. Published in: ULTRASONICS, 40 (1-8). pp. 477-483. ISSN 0041-624X.
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Abstract
Surface micromachined, capacitive ultrasonic transducers have been fabricated using a low thermal budget, CMOS-compatible process. They exhibit interesting properties for transduction in air at frequencies in excess of 1 MHz, when driven from a standard ultrasonic voltage source. Experiments are described using I mm square devices in air, operating in both pitch-catch and pulse-echo modes. The dependence on d.c. bias voltage is examined, together with calibration measurements using 1/8 in. microphones. The radiated beam profile, and the farfield directivity pattern, have been measured for both broad bandwidth and one-burst excitation, using a scanned miniature receiver. A 16 element square array is also presented, which has been used to measure the beam cross-sections from a focussed source. (C) 2002 Elsevier Science B.V. All rights reserved.
Item Type: | Conference Item (UNSPECIFIED) | ||||
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Subjects: | T Technology > TA Engineering (General). Civil engineering (General) R Medicine |
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Journal or Publication Title: | ULTRASONICS | ||||
Publisher: | ELSEVIER SCIENCE BV | ||||
ISSN: | 0041-624X | ||||
Official Date: | May 2002 | ||||
Dates: |
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Volume: | 40 | ||||
Number: | 1-8 | ||||
Number of Pages: | 7 | ||||
Page Range: | pp. 477-483 | ||||
Publication Status: | Published | ||||
Title of Event: | 1st Ultrasonics International Conference | ||||
Location of Event: | DELFT, NETHERLANDS | ||||
Date(s) of Event: | JUL 03-05, 2001 |
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