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Development and testing of a XYZ scanner for atomic force microscope
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Cai, Kunhai, He, Xianbin, Tian, Yanling, Liu, Xianping and Cui, Liangyu (2018) Development and testing of a XYZ scanner for atomic force microscope. In: Eskola, Hannu and Väisänen, Outi and Viik, Jari and Hyttinen, Jari, (eds.) EMBEC & NBC 2017. IFMBE Proceedings, 65 . Singapore: Springer, pp. 326-329. ISBN 9789811051210
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WRAP-development-testing-XYZ-scanner-atomic-force-microscope-Tian-2018.pdf - Accepted Version - Requires a PDF viewer. Download (1126Kb) | Preview |
Official URL: http://dx.doi.org/10.1007/978-981-10-5122-7_82
Abstract
Atomic force microscopy (AFM) is a widely used tool in nano measurement and manipulation techniques. However, a traditional AFM system suffers from the limitation of slow scanning rate, due to the low dynamic performance of piezoelectric positioners. As an important part of AFM system, scanner will have a significant impact the result of the scanning imaging and operation. It is well know that high-speed operation of an AFM are increasingly required, and it is also a challenge for the researchers. In this paper, we proposed a parallel kinematic high-speed piezoelectric actuator (PZT) XYZ scanner. The design is aimed at achieving high resonance frequencies and low cross-coupling. The developed stage consists of a parallel kinematic XY stage and a Z stage. The Z stage is mounted on the central moving platform of the XY stage. To achieve the design objective, several parallel leaf flexure hinge mechanisms, arranging symmetrically around the central moving platform of the XY stage, are utilized to provide large stiffness and reduce cross-coupling. For the Z stage, a symmetrical leaf flexure parallelogram mechanism is adopted to achieve high resonance frequencies and decoupling. Then, finite element analysis (FEA) is utilized to validate the characteristics of the XYZ scanner. Finally, extensive experiments are conducted, demonstrating feasibility of the proposed scanner.
Item Type: | Book Item | ||||||||||||||||||
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Subjects: | Q Science > QH Natural history | ||||||||||||||||||
Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||||||||||||||||
Library of Congress Subject Headings (LCSH): | Atomic force microscopy | ||||||||||||||||||
Series Name: | IFMBE Proceedings | ||||||||||||||||||
Journal or Publication Title: | IFMBE Proceedings | ||||||||||||||||||
Publisher: | Springer | ||||||||||||||||||
Place of Publication: | Singapore | ||||||||||||||||||
ISBN: | 9789811051210 | ||||||||||||||||||
ISSN: | 1680-0737 | ||||||||||||||||||
Book Title: | EMBEC & NBC 2017 | ||||||||||||||||||
Editor: | Eskola, Hannu and Väisänen, Outi and Viik, Jari and Hyttinen, Jari | ||||||||||||||||||
Official Date: | 2018 | ||||||||||||||||||
Dates: |
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Volume: | 65 | ||||||||||||||||||
Page Range: | pp. 326-329 | ||||||||||||||||||
DOI: | 10.1007/978-981-10-5122-7_82 | ||||||||||||||||||
Status: | Peer Reviewed | ||||||||||||||||||
Publication Status: | Published | ||||||||||||||||||
Reuse Statement (publisher, data, author rights): | This is a post-peer-review, pre-copyedit version of an article published in IFMBE Proceedings. The final authenticated version is available online at: http://dx.doi.org/10.1007/978-981-10-5122-7_82 | ||||||||||||||||||
Access rights to Published version: | Restricted or Subscription Access | ||||||||||||||||||
Date of first compliant deposit: | 7 March 2019 | ||||||||||||||||||
Date of first compliant Open Access: | 12 March 2019 | ||||||||||||||||||
RIOXX Funder/Project Grant: |
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Title of Event: | European Medical and Biological Engineering Conference | ||||||||||||||||||
Type of Event: | Conference | ||||||||||||||||||
Location of Event: | Tampere, Finland | ||||||||||||||||||
Date(s) of Event: | 11-15 Jun 2017 |
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