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Deep-structured machine learning model for the recognition of mixed-defect patterns in semiconductor fabrication processes
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Tello, Ghalia, Al-Jarrah, Omar Y., Yoo, Paul D., Al-Hammadi, Yousof, Muhaidat, Sami and Lee, Uihyoung (2018) Deep-structured machine learning model for the recognition of mixed-defect patterns in semiconductor fabrication processes. IEEE Transactions on Semiconductor Manufacturing, 31 (2). pp. 315-322. doi:10.1109/TSM.2018.2825482 ISSN 0894-6507.
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Official URL: http://dx.doi.org/10.1109/TSM.2018.2825482
| Item Type: | Journal Article | ||||
|---|---|---|---|---|---|
| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > WMG (Formerly the Warwick Manufacturing Group) | ||||
| Journal or Publication Title: | IEEE Transactions on Semiconductor Manufacturing | ||||
| Publisher: | IEEE Computer Society | ||||
| ISSN: | 0894-6507 | ||||
| Official Date: | 2018 | ||||
| Dates: |
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| Volume: | 31 | ||||
| Number: | 2 | ||||
| Page Range: | pp. 315-322 | ||||
| DOI: | 10.1109/TSM.2018.2825482 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Restricted or Subscription Access |
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