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Modeling and control methodology for an XYZ micro manipulator
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Tian, Yanling, Ma, Yue, Lu, Kangkang, Yang, Mingxuan, Zhao, Xiaolu, Wang, Fujun and Zhang, Dawei (2019) Modeling and control methodology for an XYZ micro manipulator. Review of Scientific Instruments, 90 (10). 105007. doi:10.1063/1.5116094 ISSN 1089-7623.
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Official URL: https://doi.org/10.1063/1.5116094
Item Type: | Journal Article | ||||||||||||||||||||||||
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Subjects: | T Technology > T Technology (General) T Technology > TK Electrical engineering. Electronics Nuclear engineering |
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Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||||||||||||||||||||||
SWORD Depositor: | Library Publications Router | ||||||||||||||||||||||||
Library of Congress Subject Headings (LCSH): | Microtechnology, Nanomanufacturing, Microelectromechanical systems | ||||||||||||||||||||||||
Journal or Publication Title: | Review of Scientific Instruments | ||||||||||||||||||||||||
Publisher: | AIP Publishing | ||||||||||||||||||||||||
ISSN: | 1089-7623 | ||||||||||||||||||||||||
Official Date: | 1 October 2019 | ||||||||||||||||||||||||
Dates: |
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Volume: | 90 | ||||||||||||||||||||||||
Number: | 10 | ||||||||||||||||||||||||
Article Number: | 105007 | ||||||||||||||||||||||||
DOI: | 10.1063/1.5116094 | ||||||||||||||||||||||||
Status: | Peer Reviewed | ||||||||||||||||||||||||
Publication Status: | Published | ||||||||||||||||||||||||
Reuse Statement (publisher, data, author rights): | โThis article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in : Rev. Sci. Instrum. 90, 105007 (2019); https://doi.org/10.1063/1.5116094 and may be found at https://doi.org/10.1063/1.5116094 | ||||||||||||||||||||||||
Access rights to Published version: | Restricted or Subscription Access | ||||||||||||||||||||||||
Date of first compliant deposit: | 22 January 2020 | ||||||||||||||||||||||||
Date of first compliant Open Access: | 23 October 2020 | ||||||||||||||||||||||||
RIOXX Funder/Project Grant: |
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