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Variability in measurements of micro lengths with a white light interferometer
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Ferri, Carlo and Brousseau, Emmanuel (2008) Variability in measurements of micro lengths with a white light interferometer. Quality and Reliability Engineering International, 24 (8). pp. 881-890. doi:10.1002/qre.903 ISSN 0748-8017.
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Official URL: http://dx.doi.org/10.1002/qre.903
Abstract
The effect of the discretionary set‐up parameters scan length and initial scanner position on the measurements of length performed with a white light interferometer microscope was investigated. In both analyses, two reference materials of nominal lengths 40 and 200 µm were considered. Random effects and mixed effects models were fitted to the data from two separate experiments. Punctual and interval estimates of variance components were provided.
Item Type: | Journal Article | ||||
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Subjects: | Q Science > QA Mathematics Q Science > QC Physics |
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Divisions: | Faculty of Science, Engineering and Medicine > Engineering > WMG (Formerly the Warwick Manufacturing Group) | ||||
Library of Congress Subject Headings (LCSH): | Analysis of variance, Interferometers, Linear models (Statistics) , Uncertainty -- Mathematical models | ||||
Journal or Publication Title: | Quality and Reliability Engineering International | ||||
Publisher: | John Wiley & Sons Ltd. | ||||
ISSN: | 0748-8017 | ||||
Official Date: | 2008 | ||||
Dates: |
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Volume: | 24 | ||||
Number: | 8 | ||||
Page Range: | pp. 881-890 | ||||
DOI: | 10.1002/qre.903 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Reuse Statement (publisher, data, author rights): | This is the peer reviewed version of the following article: Ferri, C. and Brousseau, E. (2008), Variability in measurements of micro lengths with a white light interferometer. Qual. Reliab. Engng. Int., 24: 881-890. doi:10.1002/qre.903, which has been published in final form at https://doi.org/10.1002/qre.903. This article may be used for non-commercial purposes in accordance with Wiley Terms and Conditions for Use of Self-Archived Versions. | ||||
Access rights to Published version: | Restricted or Subscription Access | ||||
Date of first compliant deposit: | 16 December 2019 | ||||
Date of first compliant Open Access: | 16 December 2019 |
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