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Exploiting energy sequencing of low energy SIMS to determine intrinsic chemical profiles with sub-nm precision
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Morris, Richard J. H. and Hase, Thomas P. A. (2018) Exploiting energy sequencing of low energy SIMS to determine intrinsic chemical profiles with sub-nm precision. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 36 (3). 03F125. doi:10.1116/1.5019644 ISSN 2166-2746.
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Official URL: http://dx.doi.org/10.1116/1.5019644
Abstract
In the past, it has been proposed that secondary ion mass spectrometry (SIMS) depth profiling of a sample using a range of beam energies could be used as a means of estimating the intrinsic sample profile by extrapolating the measured profile parameters back to zero beam energy. In this paper, the authors address some of the issues that have hindered this approach and demonstrate a new metrology that exploits the idea of energy sequencing to yield intrinsic sample features with subnanometer precision. A significant reason why energy sequencing has not been exploited fully to date is because previous attempts failed to consider the convolution between the sample feature and response function parameters. Their new metrology overcomes this by utilizing a simultaneous fitting approach for which the sample feature is shared across all the profile fits and only the energy dependent response function parameters are varied between profiles using a power law dependence. The authors demonstrate how this approach now allows the intrinsic sample feature to be resolved robustly and with high precision. Additionally, the authors also show that once a specific matrix response function power law dependence has been established, as few as two SIMS profile energies would be sufficient to accurately determine the intrinsic sample feature. This new metrology approach is demonstrated using an atomically sharp SiGe/Si interface and was benchmarked against atomic resolution high angle annular dark field-scanning transmission electron microscopy.
Item Type: | Journal Article | ||||||
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Subjects: | Q Science > QC Physics | ||||||
Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||||
Journal or Publication Title: | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | ||||||
Publisher: | A I P Publishing LLC | ||||||
ISSN: | 2166-2746 | ||||||
Official Date: | 1 March 2018 | ||||||
Dates: |
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Volume: | 36 | ||||||
Number: | 3 | ||||||
Article Number: | 03F125 | ||||||
DOI: | 10.1116/1.5019644 | ||||||
Status: | Peer Reviewed | ||||||
Publication Status: | Published | ||||||
Access rights to Published version: | Restricted or Subscription Access |
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