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Substrate strain induced crystallographic texture in sputtered vanadium metal films
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UNSPECIFIED (1998) Substrate strain induced crystallographic texture in sputtered vanadium metal films. JOURNAL OF MATERIALS RESEARCH, 13 (11). pp. 3221-3226. ISSN 0884-2914.
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Abstract
The effects of varying surface strain of glass substrates on the crystallographic texture of vanadium metal thin films are reported. The strain on a soda glass surface can be varied as a function of duration of exchanging the Na ions with larger ions, K, Rb, and Cs. The films, which are oriented in the (110) direction on unstrained glasses, pass through a region of completely random orientation as the strain on the substrates increases and regain the (110) orientation as substrate strain relaxation occurs. The magnitude of relaxation and, therefore, the preferred (110) orientation is ion-size dependent. This behavior is due to the change in total surface energy and provides experimental means for demonstrating the effects of surface energy on the crystalline evolution of thin films.
Item Type: | Journal Article | ||||
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Subjects: | T Technology > TA Engineering (General). Civil engineering (General) | ||||
Journal or Publication Title: | JOURNAL OF MATERIALS RESEARCH | ||||
Publisher: | MATERIALS RESEARCH SOCIETY | ||||
ISSN: | 0884-2914 | ||||
Official Date: | November 1998 | ||||
Dates: |
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Volume: | 13 | ||||
Number: | 11 | ||||
Number of Pages: | 6 | ||||
Page Range: | pp. 3221-3226 | ||||
Publication Status: | Published |
Data sourced from Thomson Reuters' Web of Knowledge
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