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A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing
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Popa, Daniel, Hopper, Richard, Ali, Syed Zeeshan, Cole, Matthew Thomas, Fan, Ye, Veigang-Radulescu, Vlad-Petru, Chikkaraddy, Rohit, Nallala, Jayakrupakar, Xing, Yuxin, Alexander-Webber, Jack, Hofmann, Stephan, De Luca, Andrea, Gardner, Julian William and Udrea, Florin (2021) A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing. Scientific Reports, 11 (1). 22915. doi:10.1038/s41598-021-02121-5 ISSN 2045-2322.
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WRAP-highly-stable-nanotube-enhanced-CMOS-MEMS-thermal-emitter-mid-IR-gas-sensing-2021.pdf - Published Version - Requires a PDF viewer. Available under License Creative Commons Attribution 4.0. Download (1804Kb) | Preview |
Official URL: http://dx.doi.org/10.1038/s41598-021-02121-5
Abstract
The gas sensor market is growing fast, driven by many socioeconomic and industrial factors. Mid-infrared (MIR) gas sensors offer excellent performance for an increasing number of sensing applications in healthcare, smart homes, and the automotive sector. Having access to low-cost, miniaturized, energy efficient light sources is of critical importance for the monolithic integration of MIR sensors. Here, we present an on-chip broadband thermal MIR source fabricated by combining a complementary metal oxide semiconductor (CMOS) micro-hotplate with a dielectric-encapsulated carbon nanotube (CNT) blackbody layer. The micro-hotplate was used during fabrication as a micro-reactor to facilitate high temperature (>700 ∘C) growth of the CNT layer and also for post-growth thermal annealing. We demonstrate, for the first time, stable extended operation in air of devices with a dielectric-encapsulated CNT layer at heater temperatures above 600 ∘C. The demonstrated devices exhibit almost unitary emissivity across the entire MIR spectrum, offering an ideal solution for low-cost, highly-integrated MIR spectroscopy for the Internet of Things.
Item Type: | Journal Article | ||||||||||||||||||
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Subjects: | T Technology > TA Engineering (General). Civil engineering (General) T Technology > TK Electrical engineering. Electronics Nuclear engineering T Technology > TP Chemical technology |
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Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||||||||||||||||
Library of Congress Subject Headings (LCSH): | Gas detectors , Gas detectors -- Industrial applications, Metal oxide semiconductors , Carbon nanotubes | ||||||||||||||||||
Journal or Publication Title: | Scientific Reports | ||||||||||||||||||
Publisher: | Nature Publishing Group | ||||||||||||||||||
ISSN: | 2045-2322 | ||||||||||||||||||
Official Date: | 25 November 2021 | ||||||||||||||||||
Dates: |
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Volume: | 11 | ||||||||||||||||||
Number: | 1 | ||||||||||||||||||
Article Number: | 22915 | ||||||||||||||||||
DOI: | 10.1038/s41598-021-02121-5 | ||||||||||||||||||
Status: | Peer Reviewed | ||||||||||||||||||
Publication Status: | Published | ||||||||||||||||||
Access rights to Published version: | Open Access (Creative Commons) | ||||||||||||||||||
Date of first compliant deposit: | 21 December 2021 | ||||||||||||||||||
Date of first compliant Open Access: | 22 December 2021 | ||||||||||||||||||
RIOXX Funder/Project Grant: |
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