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UNSPECIFIED (1997) Surface metrology. MEASUREMENT SCIENCE & TECHNOLOGY, 8 (9). pp. 955-972.
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Abstract
Some important types of instrumentation for measuring surfaces both past and present are reviewed. Exhaustive lists of instruments and performance are not presented; rather more emphasis is placed on the philosophy of measurement. An attempt is made to classify the surface features and also the function of surfaces as a pre-requisite to measurement. It is revealed that, as the push towards miniaturization is being taken beyond the nanometrology scale, some theoretical restrictions are likely to be encountered.
Item Type: | Journal Item | ||||
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Subjects: | T Technology > TA Engineering (General). Civil engineering (General) | ||||
Journal or Publication Title: | MEASUREMENT SCIENCE & TECHNOLOGY | ||||
Publisher: | IOP PUBLISHING LTD | ||||
ISSN: | 0957-0233 | ||||
Official Date: | September 1997 | ||||
Dates: |
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Volume: | 8 | ||||
Number: | 9 | ||||
Number of Pages: | 18 | ||||
Page Range: | pp. 955-972 | ||||
Publication Status: | Published |
Data sourced from Thomson Reuters' Web of Knowledge
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