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Combined resistive and calorimetric sensing of gases using a single silicon micromachined device
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UNSPECIFIED (1997) Combined resistive and calorimetric sensing of gases using a single silicon micromachined device. In: 1997 International Conference on Solid-State Sensors and Actuators, CHICAGO, IL, JUN 16-19, 1997. Published in: TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 pp. 935-938. ISBN 0-7803-3829-4.
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Abstract
In this paper we report on the fabrication, testing and implementation of a planar silicon micromachined device that can be simultaneously operated as a low power microcalorimeter and a resistive gas sensor.
A ''dual-mode'' sensor has therefore been designed to maximise application flexibility and minimise production costs.
Item Type: | Conference Item (UNSPECIFIED) | ||||
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Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering | ||||
Journal or Publication Title: | TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | ||||
Publisher: | I E E E | ||||
ISBN: | 0-7803-3829-4 | ||||
Official Date: | 1997 | ||||
Dates: |
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Number of Pages: | 4 | ||||
Page Range: | pp. 935-938 | ||||
Publication Status: | Published | ||||
Title of Event: | 1997 International Conference on Solid-State Sensors and Actuators | ||||
Location of Event: | CHICAGO, IL | ||||
Date(s) of Event: | JUN 16-19, 1997 |
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