Dataset for:

"Stable chemical enhancement of passivating nanolayer structures grown by atomic layer deposition on silicon"

by Sophie L. Pain, Edris Khorani, Tim Niewelt, Ailish Wratten, Marc Walker, Nicholas E. Grant and John D. Murphy

Accepted for publication in Nanoscale on 31st May 2023.

DOI: not available at time of dataset publication. 

The dataset (a single file in XLSX format) contains the data behind the figures in the paper. Captions to the figures are given in the paper. Abbreviations, variables and methods used are defined in the paper. 

Please address any queries to sophie.l.pain@warwick.ac.uk or john.d.murphy@warwick.ac.uk.