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Field characterization of an air-coupled micromachined ultrasonic capacitance transducer
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UNSPECIFIED (1997) Field characterization of an air-coupled micromachined ultrasonic capacitance transducer. JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 101 (1). pp. 315-322. ISSN 0001-4966.
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Abstract
Investigations into the field characteristics of an air-coupled ultrasonic capacitance transducer have been performed for a range of transducer configurations. The field of a 2-MHz bandwidth silicon backplate capacitance transducer has been scanned in air using a l-mm-diam miniature detector at frequencies of up to 1.5 MHz. The radiated peak sound-pressure field is compared to theory based on a plane piston approach for various driving signals, namely pulsed and tone burst excitation. Aperture modifications, such as an annulus and a zone plate, have also been investigated and the devices have been shown to behave as predicted by theory. (C) 1997 Acoustical Society of America.
Item Type: | Journal Article | ||||
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Subjects: | T Technology > TA Engineering (General). Civil engineering (General) | ||||
Journal or Publication Title: | JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA | ||||
Publisher: | AMER INST PHYSICS | ||||
ISSN: | 0001-4966 | ||||
Official Date: | January 1997 | ||||
Dates: |
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Volume: | 101 | ||||
Number: | 1 | ||||
Number of Pages: | 8 | ||||
Page Range: | pp. 315-322 | ||||
Publication Status: | Published |
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