The Library
Design and characterization of a flexure-based hybrid mechanism for precise micro/nano positioning
Tools
Tran, Kim Sang, Lai, Kai Zhong, Shirinzadeh, Bijan, Ehrampoosh, Armin, Tian, Yanling, Zhang, Dawei and Qin, Yanding (2023) Design and characterization of a flexure-based hybrid mechanism for precise micro/nano positioning. In: 2023 26th International Conference on Mechatronics Technology (ICMT), Busan, Republic of Korea, 18-21 Oct 2023 ISBN 9798350381429. doi:10.1109/icmt59920.2023.10373645
Research output not available from this repository.
Request-a-Copy directly from author or use local Library Get it For Me service.
Official URL: https://doi.org/10.1109/icmt59920.2023.10373645
Abstract
This paper presents a hybrid mechanism for micro/nano positioning and manipulation by combining a piezoelectric actuator (PEA) and a voice coil motor (VCM) using a flexure bridge. The research investigates the behavior of the hybrid mechanism, designs the amplification mechanism, and characterizes and compares the dominant parameters through modal and finite element analysis. The models were designed using Solidworks software and optimized using response surface in ANSYS. The hybrid mechanism provides both long-range displacement and precision movement capabilities, making it suitable for micro-assembly, micro-manipulation, and microfluidics applications. The results illustrate that the amplification ratio of the flexure mechanism obtained by modal analysis was 4.38, which was 3.42% larger than that simulated by finite element model. The input stiffness of the flexure mechanism was 2231.81 N/mm, which is slightly lower than the figure calculated by Finite element analysis (FEA) at 2325.58 N/mm. However, the difference between the two output stiffnesses of this mechanism obtained by the two methods is close, standing at 1.60%.
Item Type: | Conference Item (Paper) | ||||
---|---|---|---|---|---|
Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
SWORD Depositor: | Library Publications Router | ||||
Publisher: | IEEE | ||||
ISBN: | 9798350381429 | ||||
Official Date: | 29 December 2023 | ||||
Dates: |
|
||||
DOI: | 10.1109/icmt59920.2023.10373645 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access | ||||
Conference Paper Type: | Paper | ||||
Title of Event: | 2023 26th International Conference on Mechatronics Technology (ICMT) | ||||
Type of Event: | Conference | ||||
Location of Event: | Busan, Republic of Korea | ||||
Date(s) of Event: | 18-21 Oct 2023 |
Request changes or add full text files to a record
Repository staff actions (login required)
View Item |