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Compensation for rapid contrast variations and correction for charging effects in scanning ion microscopy
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UNSPECIFIED (1995) Compensation for rapid contrast variations and correction for charging effects in scanning ion microscopy. In: Conference on Electron-Beam Sources and Charged-Particle Optics, SAN DIEGO, CA, JUL 10-14, 1995. Published in: ELECTRON-BEAM SOURCES AND CHARGED-PARTICLE OPTICS, 2522 pp. 421-429. ISBN 0-8194-1881-1.
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Item Type: | Conference Item (UNSPECIFIED) | ||||
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Subjects: | Q Science > QC Physics | ||||
Series Name: | PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE) | ||||
Journal or Publication Title: | ELECTRON-BEAM SOURCES AND CHARGED-PARTICLE OPTICS | ||||
Publisher: | SPIE - INT SOC OPTICAL ENGINEERING | ||||
ISBN: | 0-8194-1881-1 | ||||
Editor: | Munro, E and Freund, HP | ||||
Official Date: | 1995 | ||||
Dates: |
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Volume: | 2522 | ||||
Number of Pages: | 9 | ||||
Page Range: | pp. 421-429 | ||||
Publication Status: | Published | ||||
Title of Event: | Conference on Electron-Beam Sources and Charged-Particle Optics | ||||
Location of Event: | SAN DIEGO, CA | ||||
Date(s) of Event: | JUL 10-14, 1995 |
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