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A laterally driven micromachined resonant pressure sensor
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UNSPECIFIED (1996) A laterally driven micromachined resonant pressure sensor. In: 8th International Conference on Solid-State Sensors and Actuators (Eurosensors IX), STOCKHOLM, SWEDEN, JUN 25-29, 1995. Published in: SENSORS AND ACTUATORS A-PHYSICAL, 52 (1-3). pp. 86-91. ISSN 0924-4247.
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Abstract
A new type of resonant pressure sensor is presented which employs a laterally driven resonant strain gauge. The resonant strain gauge is designed using simple linear elastic theory and the sensor fabricated by a combination of bulk- and surface-micromachining techniques. The strain gauge is driven electrostatically and the resultant vibration sensed capacitively. Its lateral mode of oscillation offers several advantages, such as a Q-factor insensitive to the leakage of cavity gases. The resonator has been designed to have a fundamental frequency of 52 kHz and a gauge factor of 60 Hz mu N-1. Preliminary measurements of devices yield a fundamental frequency of 52+/-15 kHz, a Q-factor in air of 50 and a pressure sensitivity of 8.8 kHz bar(-1).
Item Type: | Conference Item (UNSPECIFIED) | ||||
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Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering | ||||
Journal or Publication Title: | SENSORS AND ACTUATORS A-PHYSICAL | ||||
Publisher: | ELSEVIER SCIENCE SA LAUSANNE | ||||
ISSN: | 0924-4247 | ||||
Official Date: | March 1996 | ||||
Dates: |
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Volume: | 52 | ||||
Number: | 1-3 | ||||
Number of Pages: | 6 | ||||
Page Range: | pp. 86-91 | ||||
Publication Status: | Published | ||||
Title of Event: | 8th International Conference on Solid-State Sensors and Actuators (Eurosensors IX) | ||||
Location of Event: | STOCKHOLM, SWEDEN | ||||
Date(s) of Event: | JUN 25-29, 1995 |
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