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SURFACE AND INTERFACE STRUCTURAL CONTROL USING COAXIAL IMPACT-COLLISION ION-SCATTERING SPECTROSCOPY (CAICISS)
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UNSPECIFIED (1995) SURFACE AND INTERFACE STRUCTURAL CONTROL USING COAXIAL IMPACT-COLLISION ION-SCATTERING SPECTROSCOPY (CAICISS). In: 13th International Conference on the Application of Accelerators in Research and Industry, DENTON, TX, NOV 07-10, 1994. Published in: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 99 (1-4). pp. 598-601. ISSN 0168-583X.
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Abstract
We have developed a system in which molecular-beam epitaxy (MBE) equipment for film growth and a coaxial impact-collision ion scattering spectroscopy (CAICISS) apparatus for monitoring the film growth are combined through a computer-controlled feedback mechanism. Using this system, the coverage of surfactant, Bi or Sb, in the growth of Ge on the Si(001) surface has been automatically kept at predetermined values during the growth of Ge. The mixing of Ge and Si at the Ge/Si(001) interface is largely suppressed and the crystalline quality of the grown Ge film is improved as the coverage of surfactant increases.
Item Type: | Conference Item (UNSPECIFIED) | ||||
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Subjects: | Q Science > QC Physics | ||||
Journal or Publication Title: | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | ||||
Publisher: | ELSEVIER SCIENCE BV | ||||
ISSN: | 0168-583X | ||||
Official Date: | May 1995 | ||||
Dates: |
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Volume: | 99 | ||||
Number: | 1-4 | ||||
Number of Pages: | 4 | ||||
Page Range: | pp. 598-601 | ||||
Publication Status: | Published | ||||
Title of Event: | 13th International Conference on the Application of Accelerators in Research and Industry | ||||
Location of Event: | DENTON, TX | ||||
Date(s) of Event: | NOV 07-10, 1994 |
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