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INTEGRATED ARRAY SENSOR FOR DETECTING ORGANIC-SOLVENTS
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UNSPECIFIED (1995) INTEGRATED ARRAY SENSOR FOR DETECTING ORGANIC-SOLVENTS. In: Eurosensors VIII, TOULOUSE, FRANCE, SEP 25-28, 1994. Published in: SENSORS AND ACTUATORS B-CHEMICAL, 26 (1-3). pp. 135-139. ISSN 0925-4005.
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Abstract
A new sensor array device has been designed to detect organic solvents; it comprises an array of six interdigital sensors lying upon a micromachined 0.5 mu m thick silicon nitride membrane. There are three separate micromachined cells with two sensors per cell. In each cell, a thin film platinum resistance thermometer/heater is sandwiched in the middle of the silicon nitride layer in order to either monitor or control the temperature of the active layer. The array device has a low power consumption of approximate to 30 mW/sensor at 400 degrees C and is capable of operating at temperatures in excess of 600 degrees C, making it suitable for inorganic (e.g., SnO2) as well as organic gas-sensitive materials. The sensor array device has been coated with both polymers and semiconducting oxides and its response to toluene, n-propanol and n-octane has been studied. The low power consumption and good thermal stability of this array device make it useful for application in portable gas monitoring equipment.
Item Type: | Conference Item (UNSPECIFIED) | ||||
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Subjects: | Q Science > QD Chemistry | ||||
Journal or Publication Title: | SENSORS AND ACTUATORS B-CHEMICAL | ||||
Publisher: | ELSEVIER SCIENCE SA LAUSANNE | ||||
ISSN: | 0925-4005 | ||||
Official Date: | May 1995 | ||||
Dates: |
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Volume: | 26 | ||||
Number: | 1-3 | ||||
Number of Pages: | 5 | ||||
Page Range: | pp. 135-139 | ||||
Publication Status: | Published | ||||
Title of Event: | Eurosensors VIII | ||||
Location of Event: | TOULOUSE, FRANCE | ||||
Date(s) of Event: | SEP 25-28, 1994 |
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