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DESIGN AND PERFORMANCE OF AN INEXPENSIVE SUBSTRATE HEATER FOR OFF-AXIS THIN-FILM DEPOSITION
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UNSPECIFIED (1995) DESIGN AND PERFORMANCE OF AN INEXPENSIVE SUBSTRATE HEATER FOR OFF-AXIS THIN-FILM DEPOSITION. MEASUREMENT SCIENCE & TECHNOLOGY, 6 (3). pp. 337-340.
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Abstract
The design and performance of a substrate heater intended for use in depositing thin films by, for example, laser ablation deposition is presented. The heater, which is simple and inexpensive to make, employs radiative heating so that the substrate may be rotated during film deposition if desired. Examples of films grown using the described heater are given.
Item Type: | Journal Item | ||||
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Subjects: | T Technology > TA Engineering (General). Civil engineering (General) | ||||
Journal or Publication Title: | MEASUREMENT SCIENCE & TECHNOLOGY | ||||
Publisher: | IOP PUBLISHING LTD | ||||
Official Date: | March 1995 | ||||
Dates: |
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Volume: | 6 | ||||
Number: | 3 | ||||
Number of Pages: | 4 | ||||
Page Range: | pp. 337-340 | ||||
Publication Status: | Published |
Data sourced from Thomson Reuters' Web of Knowledge
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