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STUDIES OF LASER-GENERATED ULTRASOUND USING A MICROMACHINED SILICON ELECTROSTATIC TRANSDUCER IN AIR
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UNSPECIFIED (1994) STUDIES OF LASER-GENERATED ULTRASOUND USING A MICROMACHINED SILICON ELECTROSTATIC TRANSDUCER IN AIR. JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 95 (5 Part 1). pp. 2567-2575. ISSN 0001-4966.
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Abstract
An air-coupled micromachined silicon electrostatic transducer has been used to detect ultrasound generated by a pulsed laser in metals and polymers. Bulk longitudinal and shear wave modes have been observed, as have Rayleigh waves in thick samples and Lamb waves in thinner plates. The results are in good agreement with surface displacement waveforms obtained using a contact capacitance device as a reference. The result is a flexible noncontact ultrasonic system with potential uses in materials characterization.
Item Type: | Journal Article | ||||
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Subjects: | T Technology > TA Engineering (General). Civil engineering (General) | ||||
Journal or Publication Title: | JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA | ||||
Publisher: | AMER INST PHYSICS | ||||
ISSN: | 0001-4966 | ||||
Official Date: | May 1994 | ||||
Dates: |
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Volume: | 95 | ||||
Number: | 5 Part 1 | ||||
Number of Pages: | 9 | ||||
Page Range: | pp. 2567-2575 | ||||
Publication Status: | Published |
Data sourced from Thomson Reuters' Web of Knowledge
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