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DRILLING OF FINE APERTURES IN THIN METALLIC FOILS USING A FOCUSED ION-BEAM
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UNSPECIFIED (1993) DRILLING OF FINE APERTURES IN THIN METALLIC FOILS USING A FOCUSED ION-BEAM. VACUUM, 44 (3-4). pp. 361-365. ISSN 0042-207X.
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Abstract
An indium focused ion beam has been used to sputter- drill holes through foils of copper (5 mum thick) and aluminium (5-25 mum thick). The drilling process Is monitored by observing the sample absorbed current and/or the transmitted current collected by a Faraday cup placed underneath the foil. The size of the exit aperture can be controlled by blanking the beam at a pre-determined time following penetration. Copper is penetrated about twice as quickly as aluminium. Exit apertures having areas as small as 0.054 mum2, corresponding to about 1 s of post-penetration drilling and to a drop of about 30 pA in absorbed current, have been fabricated in 5 mum thick aluminium foil. Penetration times increase rapidly for aluminium foils thicker than 10 mum.
Item Type: | Journal Article | ||||
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Subjects: | T Technology > TA Engineering (General). Civil engineering (General) Q Science > QC Physics |
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Journal or Publication Title: | VACUUM | ||||
Publisher: | PERGAMON-ELSEVIER SCIENCE LTD | ||||
ISSN: | 0042-207X | ||||
Official Date: | March 1993 | ||||
Dates: |
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Volume: | 44 | ||||
Number: | 3-4 | ||||
Number of Pages: | 5 | ||||
Page Range: | pp. 361-365 | ||||
Publication Status: | Published |
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