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ION-BEAM MACHINING OF MICROMECHANICAL COMPONENTS
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UNSPECIFIED (1987) ION-BEAM MACHINING OF MICROMECHANICAL COMPONENTS. F&M-FEINWERKTECHNIK & MESSTECHNIK, 95 (4). pp. 243-244. ISSN 0340-1952.
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Item Type: | Journal Article | ||||
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Subjects: | T Technology > TA Engineering (General). Civil engineering (General) | ||||
Journal or Publication Title: | F&M-FEINWERKTECHNIK & MESSTECHNIK | ||||
Publisher: | CARL HANSER VERLAG | ||||
ISSN: | 0340-1952 | ||||
Official Date: | May 1987 | ||||
Dates: |
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Volume: | 95 | ||||
Number: | 4 | ||||
Number of Pages: | 2 | ||||
Page Range: | pp. 243-244 | ||||
Publication Status: | Published |
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