The Library
Relaxation of strained silicon on virtual substrates
Tools
Parsons, Jonathan (2008) Relaxation of strained silicon on virtual substrates. PhD thesis, University of Warwick.
PDF
WRAP_THESIS_Parsons_2007.pdf - Requires a PDF viewer. Download (5Mb) |
Official URL: http://www2.warwick.ac.uk/fac/sci/physics/research...
Abstract
The relaxation of variable thickness strained silicon layers on 20% and 50% germanium composition virtual substrates have been quantified using two independent methods. High resolution X-ray diffraction offers a means to measure relaxation directly, and a defect etching technique has been developed from which relaxation can be determined by the measurement of dislocation densities. Comparisons between the relaxation of tensile strained silicon in this work and compressively strained Si1−xGex in other works, suggest that strained silicon is unusually stable to relaxation. Observation of dislocation structures with defect etching and transmission electron microscopy have shown that the additional stability arises from the interaction of dislocations which inhibits glide. Extended stacking faults, which only form when the strain is tensile (and are therefore absent in compressively strained Si1−xGex), are more effective at impeding dislocation glide and it is their increased density in thicker layers which yield enhanced stability, even after high temperature annealing.
Item Type: | Thesis (PhD) | ||||
---|---|---|---|---|---|
Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering Q Science > QC Physics |
||||
Library of Congress Subject Headings (LCSH): | Silicon compounds, Germanium compounds, Relaxation (Nuclear physics), Dislocations in metals | ||||
Official Date: | 2008 | ||||
Dates: |
|
||||
Institution: | University of Warwick | ||||
Theses Department: | Department of Physics | ||||
Thesis Type: | PhD | ||||
Publication Status: | Unpublished | ||||
Supervisor(s)/Advisor: | Parker, Evan H. C. ; Leadley, D. R. (David R.) | ||||
Format of File: | |||||
Extent: | 182 leaves : charts | ||||
Language: | eng |
Request changes or add full text files to a record
Repository staff actions (login required)
View Item |
Downloads
Downloads per month over past year