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Electron beam lithographically-defined scanning electrochemical-atomic force microscopy probes : fabrication method and application to high resolution imaging on heterogeneously active surfaces
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Dobson, Phillip S., Weaver, John M. R., Burt, David P., Holder, Mark N., Wilson, Neil R., Unwin, Patrick R. and Macpherson, Julie V. (2006) Electron beam lithographically-defined scanning electrochemical-atomic force microscopy probes : fabrication method and application to high resolution imaging on heterogeneously active surfaces. Physical Chemistry Chemical Physics, Volume 8 (Number 33). pp. 3909-3914. doi:10.1039/b605828k ISSN 1463-9076.
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Official URL: http://dx.doi.org/10.1039/b605828k
Abstract
This paper describes in detail the use of electron beam lithography (EBL) to successfully batch microfabricate combined scanning electrochemical-atomic force microscopy (SECM-AFM) probes. At present, the process produces sixty probes at a time, on a 1/4 of a three-inch wafer. Using EBL, gold triangular-shaped electrodes can be defined at the tip apex, with plasma enhanced chemical vapor deposited silicon nitride serving as an effective insulating layer, at a thickness of 75 nm. The key features of the fabrication technique and the critical steps are discussed. The capability of these probes for SECM-AFM imaging in both tapping and constant distance mode is illustrated with dual topographical-electrochemical scans over an array of closely-spaced 1 mm diameter Pt disc electrodes, held at a suitable potential to generate an electroactive species at a transport-limited rate. As highlighted herein, understanding diffusion to heterogeneous electrode surfaces, including array electrodes, is currently topical and we present preliminary data highlighting the use of SECM-AFM as a valuable tool for the investigation of diffusion and reactivity at high spatial resolution.
Item Type: | Journal Article | ||||
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Subjects: | Q Science > QD Chemistry Q Science > QC Physics |
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Divisions: | Faculty of Science, Engineering and Medicine > Science > Chemistry | ||||
Journal or Publication Title: | Physical Chemistry Chemical Physics | ||||
Publisher: | Royal Society of Chemistry | ||||
ISSN: | 1463-9076 | ||||
Official Date: | 2006 | ||||
Dates: |
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Volume: | Volume 8 | ||||
Number: | Number 33 | ||||
Number of Pages: | 6 | ||||
Page Range: | pp. 3909-3914 | ||||
DOI: | 10.1039/b605828k | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access |
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