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Theoretical study on thin-film formation by parallel molecular dynamics simulation
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UNSPECIFIED (2005) Theoretical study on thin-film formation by parallel molecular dynamics simulation. In: International Conference on Science and Technology of Synthetic Metals, Wollongong, AUSTRALIA, JUN 28-JUL 02, 2004. Published in: SYNTHETIC METALS, 155 (3). pp. 652-656. doi:10.1016/j.synthmet.2005.08.022 ISSN 0379-6779.
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Official URL: http://dx.doi.org/10.1016/j.synthmet.2005.08.022
Abstract
Chemical vapor deposition is gradually emphasized as one promising method of nanomaterial formation. Such growth mechanism has been mainly investigated on basis of experiment. Due to large cost of experiment and low level of current measurement, the comprehension about effect of formation condition on properties of nanomaterial is limited in qualitative manner. Two quantitative items: adhesion between cluster and substrate, and degree of epitaxial growth were proposed to evaluate the property of thin film. In this simulation, three different cluster sizes of 203, 653, 1563 atoms with different velocities (0, 10, 100, 1000, 3000 m/s) were deposited on Cu (0 0 1) substrate whose temperature was set between 300 and 1000 K. Within one velocity range, not only the speed of epitaxial growth and adhesion of thin film were enhanced, but also the degree of epitaxy increased with velocity increasing. Moreover, the epitaxial growth became well as the temperature of substrate was raised within a certain range, and the degree of epitaxy of small cluster was larger than larger cluster. The results indicated that the property of thin film could be controlled if the effect of situations of process was made clear. (C) 2005 Elsevier B.V. All rights reserved.
Item Type: | Conference Item (UNSPECIFIED) | ||||
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Subjects: | T Technology > TA Engineering (General). Civil engineering (General) Q Science > QC Physics Q Science > QD Chemistry |
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Journal or Publication Title: | SYNTHETIC METALS | ||||
Publisher: | ELSEVIER SCIENCE SA | ||||
ISSN: | 0379-6779 | ||||
Official Date: | 15 December 2005 | ||||
Dates: |
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Volume: | 155 | ||||
Number: | 3 | ||||
Number of Pages: | 5 | ||||
Page Range: | pp. 652-656 | ||||
DOI: | 10.1016/j.synthmet.2005.08.022 | ||||
Publication Status: | Published | ||||
Title of Event: | International Conference on Science and Technology of Synthetic Metals | ||||
Location of Event: | Wollongong, AUSTRALIA | ||||
Date(s) of Event: | JUN 28-JUL 02, 2004 |
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