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Fabrication of Pb(Mg1/3Nb2/3)O-3-PbTiO3 relaxor ferroelectric thin films on Si using SrO buffer layer and SrRuO3 electrode
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UNSPECIFIED (2005) Fabrication of Pb(Mg1/3Nb2/3)O-3-PbTiO3 relaxor ferroelectric thin films on Si using SrO buffer layer and SrRuO3 electrode. In: 4th Asian Meeting on Ferroelectricity (AMF-4), Indian Inst Sci, Bangalore, INDIA, DEC 12-15, 2003. Published in: FERROELECTRICS, 328 pp. 85-90. doi:10.1080/00150190500311268 ISSN 0015-0193.
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Official URL: http://dx.doi.org/10.1080/00150190500311268
Abstract
0.9Pb(Mg-1/3 Nb-2/3)O-3 - 0.1 PbTiO3 (0.9 PMN-0.1 PT) thin films were deposited on Si substrates by pulsed laser deposition using SrO as buffer layer and a conducting perovskite SrRuO3 electrode. For comparison, we have also grown 0.9 PMN-0.1 PT thin films on commercially available Pt/TiO2 /SiO2 /Si substrates. PMN-PT thin films grown on SrRuO3 /SrO/Si are pure and oriented such as (001)film/(001)lower electrode/(001)substrate. However, 0.9 PMN-0.1 PT thin films grown on Pt/TiO2/SiO2 /Si substrate show preferential (111) orientation of the perovskite phase with the presence of some (100) and (110) reflections. The lower electrode plays the crucial role to control the microstructure of the thin films. The sizes of the grains depend upon the nucleation density and the rate of growth onto the lower electrode used. The surface of the 0.9 PMN-0.1 PT thin films grown on SrRuO3 (001) is quite different from that of the film on Pt (111). Well connecting granularly shaped grains are present at around 2 mu m diameter on SrRuO3 and the grain sizes in case of films grown on the Pt/TiO2/SiO2/Si substrate is in the range of .4 to .8 mu m.
Item Type: | Conference Item (UNSPECIFIED) | ||||
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Subjects: | T Technology > TA Engineering (General). Civil engineering (General) Q Science > QC Physics |
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Journal or Publication Title: | FERROELECTRICS | ||||
Publisher: | TAYLOR & FRANCIS LTD | ||||
ISSN: | 0015-0193 | ||||
Official Date: | 2005 | ||||
Dates: |
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Volume: | 328 | ||||
Number of Pages: | 6 | ||||
Page Range: | pp. 85-90 | ||||
DOI: | 10.1080/00150190500311268 | ||||
Publication Status: | Published | ||||
Title of Event: | 4th Asian Meeting on Ferroelectricity (AMF-4) | ||||
Location of Event: | Indian Inst Sci, Bangalore, INDIA | ||||
Date(s) of Event: | DEC 12-15, 2003 |
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