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SOI diode temperature sensor operated at ultra high temperatures - a critical analysis
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Santra, Sumita, Guha, Prasanta K., Ali, Syed Z., Haneef, I., Udrea, Florin and Gardner, J. W. (2008) SOI diode temperature sensor operated at ultra high temperatures - a critical analysis. In: 7th IEEE Conference on Sensors, Lecce, Italy, Oct 26-29, 2008. Published in: Proceedings of the 7th IEEE Conference on Sensors pp. 78-81. doi:10.1109/ICSENS.2008.4716387 ISSN 1930-0395 .
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Official URL: http://dx.doi.org/10.1109/ICSENS.2008.4716387
Abstract
This paper investigates the performance of diode temperature sensors when operated at ultra high temperatures (above 250degC). A low leakage silicon on insulator (SOI) diode was designed and fabricated in a 1 mum CMOS process and suspended within a dielectric membrane for efficient thermal insulation. The diode can be used for accurate temperature monitoring in a variety of sensors such as microcalorimeters, IR detectors, or thermal flow sensors. A CMOS compatible micro-heater was integrated with the diode for local heating. It was found that the diode forward voltage exhibited a linear dependence on temperature as long as the reverse saturation current remained below the forward driving current. We have proven experimentally that the maximum temperature can be as high as 550degC. Long term continuous operation at high temperatures (400degC) showed good stability of the voltage drop. Furthermore, we carried out a detailed theoretical analysis to determine the maximum operating temperature and explain the presence of nonlinearity factors at ultra high temperatures.
Item Type: | Conference Item (Paper) | ||||
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Subjects: | Q Science > QC Physics T Technology > TK Electrical engineering. Electronics Nuclear engineering |
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Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
Library of Congress Subject Headings (LCSH): | Silicon-on-insulator technology, Detectors, Temperature measuring instruments, High temperatures | ||||
Journal or Publication Title: | Proceedings of the 7th IEEE Conference on Sensors | ||||
Publisher: | Institute of Electrical and Electronics Engineers | ||||
ISSN: | 1930-0395 | ||||
Book Title: | 2008 IEEE Sensors | ||||
Official Date: | 2008 | ||||
Dates: |
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Page Range: | pp. 78-81 | ||||
DOI: | 10.1109/ICSENS.2008.4716387 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access | ||||
Conference Paper Type: | Paper | ||||
Title of Event: | 7th IEEE Conference on Sensors | ||||
Type of Event: | Conference | ||||
Location of Event: | Lecce, Italy | ||||
Date(s) of Event: | Oct 26-29, 2008 |
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