The Library
Calibration of thickness-dependent k-factors for germanium X-ray lines to improve energy-dispersive X-ray spectroscopy of SiGe layers in analytical transmission electron microscopy
Tools
Qiu, Yi, Nguyen, Van Huy, Dobbie, A. (Andrew), Myronov, Maksym and Walther, T. (Thomas) (2013) Calibration of thickness-dependent k-factors for germanium X-ray lines to improve energy-dispersive X-ray spectroscopy of SiGe layers in analytical transmission electron microscopy. Journal of Physics: Conference Series, Volume 471 . Article number 012031. doi:10.1088/1742-6596/471/1/012031 ISSN 1742-6596.
|
Text
WRAP_1742-6596_471_1_012031.pdf - Published Version Available under License Creative Commons Attribution. Download (730Kb) | Preview |
Official URL: http://dx.doi.org/10.1088/1742-6596/471/1/012031
Abstract
We show that the accuracy of energy-dispersive X-ray spectroscopy can be improved by analysing and comparing multiple lines from the same element. For each line, an effective k-factor can be defined that varies as a function of the intensity ratio of multiple lines (e.g. K/L) from the same element. This basically performs an internal self-consistency check in the quantification using differently absorbed X-ray lines, which is in principle equivalent to an absorption correction as a function of specimen thickness but has the practical advantage that the specimen thickness itself does not actually need to be measured.
Item Type: | Journal Article | ||||
---|---|---|---|---|---|
Subjects: | Q Science > QC Physics | ||||
Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||
Library of Congress Subject Headings (LCSH): | Germanium , Electron microscopy , X-ray spectroscopy | ||||
Journal or Publication Title: | Journal of Physics: Conference Series | ||||
Publisher: | Institute of Physics Publishing Ltd. | ||||
ISSN: | 1742-6596 | ||||
Official Date: | 2013 | ||||
Dates: |
|
||||
Volume: | Volume 471 | ||||
Page Range: | Article number 012031 | ||||
DOI: | 10.1088/1742-6596/471/1/012031 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access | ||||
Date of first compliant deposit: | 26 December 2015 | ||||
Date of first compliant Open Access: | 26 December 2015 |
Request changes or add full text files to a record
Repository staff actions (login required)
View Item |
Downloads
Downloads per month over past year