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Growth and morphology control of carbon nanotubes at the apexes of pyramidal silicon tips
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Edgeworth, Jonathan P., Burt, David P., Dobson, Phillip S., Weaver, J. M. R. and Macpherson, Julie V. (2010) Growth and morphology control of carbon nanotubes at the apexes of pyramidal silicon tips. Nanotechnology, Vol.21 (No.10). p. 105605. doi:10.1088/0957-4484/21/10/105605 ISSN 0957-4484.
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Official URL: http://dx.doi.org/10.1088/0957-4484/21/10/105605
Abstract
We describe the development of catalysed chemical vapour deposition (cCVD) growth schemes suitable for the production of carbon nanotube atomic force microscopy (CNT-AFM) probes. Growth and sample processing conditions are utilized that both incorporate safety in the process, e. g. the use of ethanol (EtOH) vapour as a carbon feedstock and hydrogen at only 4% (flow proportion), and simplicity, e. g. no catalyst patterning is required. Cobalt is employed as the growth catalyst and thin films of aluminium on silicon as the substrate material. Purpose-fabricated silicon substrates containing large numbers of tip structures are used as models of AFM probes. This enables growth to be carried out on many tips at once, facilitating a thorough investigation of the effect of different growth schemes on yields. cCVD growth schemes are chosen which produce stabilizing high density networks of carbon nanotubes on the sidewalls of the pyramidal tips to aid in anchoring the apex protruding carbon nanotube(s) in place. This results in long-lasting AFM imaging tips. We demonstrate that through rational tailoring of cCVD conditions it is possible to tune the growth conditions such that CNTs which protrude straight from tip apexes can be obtained at yields of greater than or equal to 78%. Application of suitable growth schemes to CNT growth on commercially available AFM probes resulted in CNT-AFM probes which were found to be extremely useful for extended lifetime metrological profiling of complex structures.
Item Type: | Journal Article | ||||
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Subjects: | Q Science > QC Physics Q Science > QD Chemistry T Technology > TA Engineering (General). Civil engineering (General) |
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Divisions: | Faculty of Science, Engineering and Medicine > Science > Chemistry | ||||
Library of Congress Subject Headings (LCSH): | Atomic force microscopy, Chemical vapor deposition, Scanning probe microscopy, Electron microscopy, Metal catalysts, Elasticity, Nanotubes | ||||
Journal or Publication Title: | Nanotechnology | ||||
Publisher: | Institute of Physics Publishing Ltd. | ||||
ISSN: | 0957-4484 | ||||
Official Date: | 12 March 2010 | ||||
Dates: |
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Volume: | Vol.21 | ||||
Number: | No.10 | ||||
Number of Pages: | 10 | ||||
Page Range: | p. 105605 | ||||
DOI: | 10.1088/0957-4484/21/10/105605 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access | ||||
Funder: | Engineering and Physical Sciences Research Council (EPSRC) | ||||
Grant number: | EP/C518268/1 (EPSRC) |
Data sourced from Thomson Reuters' Web of Knowledge
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