Mehmet, Kemâl (1970) Microwave integrated circuits : preparation and measurement techniques for materials and components. PhD thesis, University of Warwick.

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Abstract

Microwave measurement of the properties of thin film dielectrics and lumped elements present difficulties because of the small volume of material involved. In this investigation both capacitively loaded coaxial cavities and capacitively loaded microstrip resonators were used.

The dielectric properties of thin films were measured using symmetrical capacitively loaded coaxial cavities. The theoretical approaches are given for the design of the cavity and for the measurement techniques using (a) the VSWR method and (b) the perturbation method.

The practical construction problems were overcome and highly stable. (mechanically as well as electrically) cavities were obtained. The measured electrical parameters of the cavities were very close to the theoretical values.

Thin dielectric films were prepared using an electron beam evaporation source and an rfg sputtering unit. The properties of these films were measured using the capacitively loaded coaxial cavity. The thin film properties were correlated with the thin film deposition conditions.

The dielectric properties of substrates used in the construction of mcrostrip transmission lines were measured on a sampling basis using a waveguide cavity technique. It was shown to be a most useful method •

Capacitively loaded microstrip resonators were used to measure lumped elements at microwave frequencies. But' first the microstrip properties had to be measured. Very accurate techniques were introduced for measuring the effective dielectric constant and the capacitance of I a gap.in the strip of a microstrip, over a range of frequencies. Alumina, sapphire and quartz substrates were used in these measurements.

The construction of .these resonators using thin film deposition and photolithographic techniques was·presented.

It is considered that ·the use of these measurement techniques will contribute significantly to further advances in the field of m.i.c's.

Item Type:	Thesis (PhD)
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering
Library of Congress Subject Headings (LCSH):	Microwave measurements, Dielectric measurements, Thin films -- Materials, Microwave integrated circuits
Official Date:	1970
Dates:	Date Event 1970 Submitted
Institution:	University of Warwick
Theses Department:	School of Engineering
Thesis Type:	PhD
Publication Status:	Unpublished
Supervisor(s)/Advisor:	McPhun, Michael Keith, 1934-
Sponsors:	Science Research Council (Great Britain)
Extent:	247 : illustrations
Language:	eng

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