Dataset for: "Exploring hafnium oxide’s potential for passivating contacts for silicon solar cells" by A. Wratten, S.L. Pain, A. Yadav, E. Khorani, T. Niewelt, L. Black, G. Bartholazzi, D. Walker, N.E. Grant, J.D. Murphy Accepted for publication in Solar Energy Materials and Solar Cells on 3rd July 2023. DOI: 10.1016/j.solmat.2023.112457 The dataset (a single file in XLSX format) contains the data behind the figures in the paper. Captions to the figures are given in the paper. Abbreviations, variables and methods used are defined in the paper. Please address any queries to john.d.murphy@warwick.ac.uk.