The Library
Mapping the strain and tilt of a suspended 3C-SiC membrane through micro X-ray diffraction
Tools
Colston, Gerard B., Rhead, Stephen, Shah, V. A., Newell, Oliver, Dolbnya, Igor P., Leadley, David R. and Myronov, Maksym (2016) Mapping the strain and tilt of a suspended 3C-SiC membrane through micro X-ray diffraction. Materials & Design, 103 . pp. 244-248. doi:10.1016/j.matdes.2016.04.078 ISSN 0264-1275.
Research output not available from this repository.
Request-a-Copy directly from author or use local Library Get it For Me service.
Official URL: http://dx.doi.org/10.1016/j.matdes.2016.04.078
Abstract
Micro X-ray diffraction (μ-XRD) has been used to map the strain profile of a suspended crystalline cubic Silicon Carbide (3C-SiC) square membrane. While the presence of crystal defects in the 3C-SiC epilayer induces significant errors on the position of the 3C-SiC Bragg peaks, relaxation from residual tensile strain can be observed and directly quantified from the XRD measurements. The advantage of μ-XRD over other strain mapping techniques is that the tilt of the crystalline layers can be measured simultaneously with the lattice parameters. Significant tilt variations have been observed at the corner of the 3C-SiC membrane, implying that the undercut from chemical etching induces distortions in the crystal structure. These distortions are likely to be the cause of the increase in strain commonly observed at the edges of suspended structures using the micro-Raman shift strain mapping technique.
Item Type: | Journal Article | ||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|
Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||||||||
Journal or Publication Title: | Materials & Design | ||||||||||
Publisher: | Elsevier Ltd | ||||||||||
ISSN: | 0264-1275 | ||||||||||
Official Date: | 5 August 2016 | ||||||||||
Dates: |
|
||||||||||
Volume: | 103 | ||||||||||
Page Range: | pp. 244-248 | ||||||||||
DOI: | 10.1016/j.matdes.2016.04.078 | ||||||||||
Status: | Peer Reviewed | ||||||||||
Publication Status: | Published | ||||||||||
Access rights to Published version: | Restricted or Subscription Access | ||||||||||
Adapted As: |
Request changes or add full text files to a record
Repository staff actions (login required)
View Item |