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Numerical simulation of a new generation of high-temperature, micropower gas and odour sensors-based on SOI technology
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Gardner, J. W., Udrea, F. and Milne, B. (1999) Numerical simulation of a new generation of high-temperature, micropower gas and odour sensors-based on SOI technology. In: Smart Structures and Materials 1999: Smart Electronics and MEMS, Newport Beach, CA , 01 Mar 1999. Published in: SPIE Proceedings, 3673 pp. 104-112. ISSN 0277-786X.
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Official URL: http://dx.doi.org/10.1117/12.354292
Abstract
Gas sensors fabricated using conventional silicon microtechnology can suffer from a number of significant disadvantages when compared with commercially available thick-him, screen-printed devices. For example, platinum gate MOSFET devices normally operate only at a temperatures of up to 180 degrees C and this limits the catalyst activity, and hence their sensitivity and response time. In addition, the fabrication of an integrated, resistive heater poses interesting problems; thus whilst polysilicon heaters are CMOS-compatible, they tend to suffer from non-linearity, poor reproducibility and stability; whereas platinum resistive heaters are incompatible with a CMOS process and thus difficult and expensive to manufacture. Here we propose the use of SOI technology leading to a new generation of high-temperature, silicon smart gas sensors (patent pending). Numerical simulations of an n-channel MOSFET structure on a thin SOI membrane have been performed in non-isothermal conditions using a MEDICI simulator. Our results demonstrate that SOI-based devices can operate at temperatures of up to 350 degrees C without causing a problem for neighbouring CMOS I.C circuitry. The power consumption of our SOT-based designs may be as low as ca. 10 mW at 300 degrees C and so compares favourably with previously reported values for non-SOI based silicon micromachined gas sensors. In conclusion, SOI technology may be used to fabricate novel high-temperature, micropower resistive and catalytic-gate MOSFET gas/odour sensors. These devices can be fabricated in a standard SOI CMOS process at low unit cost and should offer an excellent degree of reproducibility. Applications envisaged are in air quality sensors for the automotive industry and odour sensors for electronic noses.
Item Type: | Conference Item (Paper) | ||||
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Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
Series Name: | PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE) | ||||
Journal or Publication Title: | SPIE Proceedings | ||||
Publisher: | S P I E - International Society for Optical Engineering | ||||
ISSN: | 0277-786X | ||||
Official Date: | 1999 | ||||
Dates: |
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Volume: | 3673 | ||||
Page Range: | pp. 104-112 | ||||
Status: | Not Peer Reviewed | ||||
Publication Status: | Published | ||||
Reuse Statement (publisher, data, author rights): | Smart Structures and Materials 1999 Conference, NEWPORT BEACH, CA, MAR 01-04, 1999 | ||||
Access rights to Published version: | Restricted or Subscription Access | ||||
Conference Paper Type: | Paper | ||||
Title of Event: | Smart Structures and Materials 1999: Smart Electronics and MEMS | ||||
Type of Event: | Conference | ||||
Location of Event: | Newport Beach, CA | ||||
Date(s) of Event: | 01 Mar 1999 | ||||
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