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Thermal modelling and characterisation of micropower chemoresistive silicon sensors
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Pike, A. and Gardner, J. W. (1997) Thermal modelling and characterisation of micropower chemoresistive silicon sensors. Sensors and Actuators B-Chemical, 45 (1). pp. 19-26. doi:10.1016/S0925-4005(97)00261-X ISSN 0925-4005.
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Official URL: http://dx.doi.org/10.1016/S0925-4005(97)00261-X
Abstract
There is considerable interest in the development of low-cost, low-power resistive sensors for possible application in hand-held gas monitors. In this paper we describe the fabrication of a high-temperature, resistive sensor using silicon microtechnology which lies on a sub-micron thick membrane with an embedded platinum resistance heater. A thermal model of this micro-hotplate is constructed and compared with its observed behaviour. The microsensor can be operated at temperatures of up to 600 degrees C and has a low d.c. power consumption per sensor of 40 mW at 300 degrees C. As the thermal time-constant of the microsensor is only about 5 ms, its average power consumption can be reduced by a factor of at least ten through an a.c. mode of operation, thus making a single device or even an array device suitable for battery-powered instruments. (C) 1997 Elsevier Science S.A.
Item Type: | Journal Article | ||||
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Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
Journal or Publication Title: | Sensors and Actuators B-Chemical | ||||
Publisher: | Elsevier Science | ||||
ISSN: | 0925-4005 | ||||
Official Date: | November 1997 | ||||
Dates: |
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Volume: | 45 | ||||
Number: | 1 | ||||
Page Range: | pp. 19-26 | ||||
DOI: | 10.1016/S0925-4005(97)00261-X | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access |
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