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Solid on liquid deposition
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Charmet, Jérôme, Banakh, O., Laux, E., Graf, B., Dias, F., Dunand, A., Keppner, H., Gorodyska, G., Textor, M., Noell, W., de Rooij, N. F., Neels, A., Dadras, M., Dommann, A., Knapp, H., Borter, Ch. and Benkhaira, M. (2010) Solid on liquid deposition. Thin Solid Films, 518 (18). pp. 5061-5065. doi:10.1016/j.tsf.2010.02.039 ISSN 0040-6090.
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Official URL: http://dx.doi.org/10.1016/j.tsf.2010.02.039
Abstract
A process for the deposition of a solid layer onto a liquid is presented. The polymer poly-di-chloro-para-xylylene, also known as Parylene C, was grown on low vapour pressure liquids using the conventional low pressure chemical vapour deposition process. A reactor was built and a process developed to enable the deposition of Parylene C at atmospheric pressure over high vapour pressure liquids. It was used to deposit Parylene C over water among others. In all cases Parylene C encapsulated the liquid without influencing its initial shape. The results presented here show also that the Parylene C properties are not affected by its growth on liquid templates and the roughness of the Parylene C surface in contact with the liquid during the deposition is extremely low.
Item Type: | Journal Article | ||||||||
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Divisions: | Faculty of Science, Engineering and Medicine > Engineering > WMG (Formerly the Warwick Manufacturing Group) | ||||||||
Journal or Publication Title: | Thin Solid Films | ||||||||
Publisher: | Elsevier S.A. | ||||||||
ISSN: | 0040-6090 | ||||||||
Official Date: | 1 July 2010 | ||||||||
Dates: |
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Volume: | 518 | ||||||||
Number: | 18 | ||||||||
Page Range: | pp. 5061-5065 | ||||||||
DOI: | 10.1016/j.tsf.2010.02.039 | ||||||||
Status: | Peer Reviewed | ||||||||
Publication Status: | Published | ||||||||
Access rights to Published version: | Restricted or Subscription Access |
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