The Library
A low-power, low-cost infra-red emitter in CMOS technology
Tools
Tools
Tools
Ali, Syed Zeeshan, De Luca, Andrea, Hopper, Richard, Boual, Sophie, Gardner, J. W. and Udrea, Florin (2015) A low-power, low-cost infra-red emitter in CMOS technology. IEEE Sensors Journal, 15 . pp. 6775-6782. ISSN 1530-437X.
![[img]](https://wrap.warwick.ac.uk/style/images/fileicons/application_pdf.png) |
PDF
WRAP_IEEE SJ IR Emitter v7.pdf - Accepted Version - Requires a PDF viewer. Download (1616Kb) |
Official URL: http://dx.doi.org/10.1109/JSEN.2015.2464693
Abstract
In this paper, 1 we present the design and characterization of a low-power low-cost infra-red emitter based on a tungsten micro-hotplate fabricated in a commercial 1-μm SOI-CMOS technology. The device has a 250-μm diameter resistive heater inside a 600-μm diameter thin dielectric membrane. We first present electro-thermal and optical device characterization, long term stability measurements, and then demonstrate its application as a gas sensor for a domestic boiler. The emitter has a dc power consumption of only 70 mW, a total emission of 0.8 mW across the 2.5–15-μm wavelength range, a 50% frequency modulation depth of 70 Hz, and excellent uniformity from device-to-device. We also compare two larger emitters (heater size of 600 and 1800 μm) made in the same technology that have a much higher infra-red emission, but at the detriment of higher power consumption. Finally, we demonstrate that carbon nanotubes can be used to significantly enhance the thermo-optical transduction efficiency of the emitter.
| Item Type: | Journal Article | ||||||
|---|---|---|---|---|---|---|---|
| Subjects: | T Technology > TH Building construction T Technology > TK Electrical engineering. Electronics Nuclear engineering |
||||||
| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||||
| Library of Congress Subject Headings (LCSH): | Boilers -- Design, Metal oxide semiconductors, Complementary, Silicon-on-insulator technology, Gas detectors , Infrared detectors , Tungsten | ||||||
| Journal or Publication Title: | IEEE Sensors Journal | ||||||
| Publisher: | Institute of Electrical and Electronic Engineers | ||||||
| ISSN: | 1530-437X | ||||||
| Official Date: | December 2015 | ||||||
| Dates: |
|
||||||
| Volume: | 15 | ||||||
| Page Range: | pp. 6775-6782 | ||||||
| Status: | Peer Reviewed | ||||||
| Publication Status: | Published | ||||||
| Access rights to Published version: | Restricted or Subscription Access | ||||||
| Date of first compliant deposit: | 9 December 2016 | ||||||
| Date of first compliant Open Access: | 12 December 2016 | ||||||
| Funder: | Seventh Framework Programme (European Commission) (FP7) | ||||||
| Grant number: | Project SOI-HITs (288481) | ||||||
| Related URLs: |
Request changes or add full text files to a record
Repository staff actions (login required)
 |
View Item |
Downloads
Downloads per month over past year
