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Laser ultrasonic characterization of membranes for use as micro-electronic mechanical systems (MEMS)
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Edwards, R. S. (Rachel Sian), Zhou, L. Q., Pearce, M. J., Prince, R. G., Myronov, Maksym, Colston, Gerard B., Leadley, D. R. (David R.) and Trushkevych, Oksana (2017) Laser ultrasonic characterization of membranes for use as micro-electronic mechanical systems (MEMS). In: 43rd Annual Review of Progress in Quantitative Nondestructive Evaluation, Atlanta, GA, USA, 17-22 Jul 2016. Published in: AIP Conference Proceedings, 1806 (1). 050013 . ISBN 9780735414747. ISSN 0094-243X.
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Official URL: http://dx.doi.org/10.1063/1.4974607
Abstract
Germanium (Ge) on Silicon (Si) has the potential to produce a wide variety of devices, including sensors, solar cells and transistors. Modification of these materials so that a suspended membrane layer is formed, through removing regions of the Si substrate, offers the potential for sensors with a more rapid response and higher sensitivity. Such membranes are a very simple micro-electronic mechanical system (MEMS). It is essential to ensure that the membranes are robust against shock and vibration, with well-characterised resonant frequencies, prior to any practical application. We present work using laser interferometry to characterise the resonant modes of membranes produced from Ge or silicon carbide (SiC) on a Si substrate, with the membranes typically having around 1 mm lateral dimensions. Two dimensional scanning of the sample enables visualisation of each mode. The stress measured from the resonant frequencies agrees well with that calculated from the growth conditions. SiC provides a more robust platform for electronics, while Ge offers better resonant properties. This offers a potential technique for characterising production quality or lifetime testing for the MEMS produced.
Item Type: | Conference Item (Paper) | ||||||
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Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering | ||||||
Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||||
Library of Congress Subject Headings (LCSH): | Germanium -- Electric properties, Silicon carbide --Electric properties | ||||||
Journal or Publication Title: | AIP Conference Proceedings | ||||||
Publisher: | American Institute of Physics | ||||||
ISBN: | 9780735414747 | ||||||
ISSN: | 0094-243X | ||||||
Official Date: | February 2017 | ||||||
Dates: |
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Volume: | 1806 | ||||||
Number: | 1 | ||||||
Page Range: | 050013 | ||||||
Status: | Peer Reviewed | ||||||
Publication Status: | Published | ||||||
Date of first compliant deposit: | 27 June 2017 | ||||||
Date of first compliant Open Access: | 27 June 2017 | ||||||
Funder: | European Research Council (ERC), Engineering and Physical Sciences Research Council (EPSRC), European Commission (EC) | ||||||
Grant number: | 202735 (ERC), EP/F040784/1, EP/J001074/1 (EPSRC), 257375 (EC) | ||||||
Conference Paper Type: | Paper | ||||||
Title of Event: | 43rd Annual Review of Progress in Quantitative Nondestructive Evaluation | ||||||
Type of Event: | Conference | ||||||
Location of Event: | Atlanta, GA, USA | ||||||
Date(s) of Event: | 17-22 Jul 2016 | ||||||
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