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A novel multi-function tribological probe microscope for characterising surface properties
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UNSPECIFIED (2002) A novel multi-function tribological probe microscope for characterising surface properties. In: 2nd International Symposium on Instrumentation Science and Technology (ISIST 2002), JINAN, PEOPLES R CHINA, AUG 18-22, 2002. Published in: PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 2 pp. 1-12. ISBN 7-5603-1768-5.
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Abstract
This paper reports a novel designed multi-function Tribological Probe Microscope (TPM), which has been recently developed to provide four function measurements in a single scan arrangement. The four functions are surface topography, friction, hardness and Young's modulus of a surface. The measurement is based on a point-by-point scanning so the four measured functions are correlated, thus enables us to link these measurements with the manufacturing processes being used for optimisation. The TPM is a force-controlled scanning probe which has two precision capacitive sensors, one I sensor is to measure surface topography and the deformation being made under a required loading force and the other is to measure the frictional force between the tip and the surface being scanned. The contact force at the tip is controlled by a magnet/coil force actuator, which applies a constant force in a range of 0.01-30 mN. The topography measurement is in a range of 15 mum with a resolution of 0.1nm. The scanning area of 100 by 100 mum is closed loop controlled with an accuracy of 1nm. Evaluations have been carried out on some specially prepared engineered surfaces and the measured results ate reported here to demonstrate the unique capability of the TPM.
Item Type: | Conference Item (UNSPECIFIED) | ||||
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Subjects: | Q Science > QD Chemistry T Technology > TK Electrical engineering. Electronics Nuclear engineering Q Science > QC Physics |
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Journal or Publication Title: | PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 2 | ||||
Publisher: | HARBIN INSTITUTE TECHNOLOGY PUBLISHERS | ||||
ISBN: | 7-5603-1768-5 | ||||
Editor: | Tan, JB and Wen, XF | ||||
Official Date: | 2002 | ||||
Dates: |
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Number of Pages: | 12 | ||||
Page Range: | pp. 1-12 | ||||
Publication Status: | Published | ||||
Title of Event: | 2nd International Symposium on Instrumentation Science and Technology (ISIST 2002) | ||||
Location of Event: | JINAN, PEOPLES R CHINA | ||||
Date(s) of Event: | AUG 18-22, 2002 |
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