Dataset for: "Low-temperature saw damage gettering to improve minority carrier lifetime in multicrystalline silicon" by Mohammad Al-Amin, Nicholas E. Grant and John D. Murphy (School of Engineering, University of Warwick, Coventry, CV4 7AL, UK) Accepted for publication in Physica Status Solidi Rapid Research Letters on 23rd August 2017 DOI: 10.1002/pssr.201700268 Article number: 1700268 The dataset (a single file in XLSX format) contains the data behind all the graphs presented in the paper. Each worksheet within the spreadsheet relates to a single figure in the paper. Captions to the figures are given in the paper. Abbreviations, variables and methods used are defined in the paper. Please address any queries to john.d.murphy@warwick.ac.uk.