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Non-linear vibrational response of Ge and SiC membranes
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Zhou, L. Q., Colston, Gerard B. , Pearce, M., Prince, R. G., Myronov, Maksym, Leadley, D. R. (David R.), Trushkevych, Oksana and Edwards, R. S. (Rachel Sian) (2017) Non-linear vibrational response of Ge and SiC membranes. Applied Physics Letters, 111 (1). 011904. doi:10.1063/1.4991537 ISSN 0003-6951.
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WRAP-non-linear-vibrational-response-Ge-SiC-membranes-Myronov-2017.pdf - Published Version - Requires a PDF viewer. Download (1966Kb) | Preview |
Official URL: http://dx.doi.org/10.1063/1.4991537
Abstract
Characterisation of membranes produced for use as micro-electro-mechanical systems using vibrational techniques can give a measure of their behaviour and suitability for operation in different environments. Two membranes are studied here: germanium (Ge) and cubic silicon carbide (3C-SiC) on a silicon (Si) substrate. When driven at higher displacements, the membranes exhibit self-protecting behaviour. The resonant vibration amplitude is limited to a maximum value of around 10 nm, through dissipation of energy via higher harmonic vibrations. This is observed for both materials, despite their different Young's moduli and defect densities.
Item Type: | Journal Article | ||||||
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Subjects: | Q Science > QC Physics Q Science > QD Chemistry |
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Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||||
Library of Congress Subject Headings (LCSH): | Germanium -- Electric properties, Silicon carbide | ||||||
Journal or Publication Title: | Applied Physics Letters | ||||||
Publisher: | American Institute of Physics | ||||||
ISSN: | 0003-6951 | ||||||
Official Date: | 6 July 2017 | ||||||
Dates: |
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Volume: | 111 | ||||||
Number: | 1 | ||||||
Article Number: | 011904 | ||||||
DOI: | 10.1063/1.4991537 | ||||||
Status: | Peer Reviewed | ||||||
Publication Status: | Published | ||||||
Access rights to Published version: | Restricted or Subscription Access | ||||||
Date of first compliant deposit: | 13 September 2017 | ||||||
Date of first compliant Open Access: | 6 July 2018 | ||||||
Funder: | Engineering and Physical Sciences Research Council (EPSRC), European Research Council (ERC), University of Warwick Higher Education Innovation Fund | ||||||
Grant number: | EP/J001074/1, EP/1031979/1 (EPSRC), Grant No. 202735 (ERC) |
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