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Bunches of misfit dislocations on the onset of relaxation of Si0.4Ge0.6/Si(001) epitaxial films revealed by high-resolution x-ray diffraction
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Kaganer, Vladimir, Ulyanenkova, Tatjana, Benediktovitch, Andrei, Myronov, Maksym and Ulyanenkov, Alex (2017) Bunches of misfit dislocations on the onset of relaxation of Si0.4Ge0.6/Si(001) epitaxial films revealed by high-resolution x-ray diffraction. Journal of Applied Physics, 122 (10). 105302. doi:10.1063/1.4990135 ISSN 0021-8979.
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Official URL: http://dx.doi.org/10.1063/1.4990135
Abstract
The experimental x-ray diffraction patterns of a Si0.4Ge0.6/Si(001) epitaxial film with a low density of misfit dislocations are modeled by the Monte Carlo method. It is shown that an inhomogeneous distribution of 60° dislocations with dislocations arranged in bunches is needed to explain the experiment correctly. As a result of the dislocation bunching, the positions of the x-ray diffraction peaks do not correspond to the average dislocation density but reveal less than a half of the actual relaxation.
Item Type: | Journal Article | ||||||
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Subjects: | Q Science > QC Physics Q Science > QD Chemistry |
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Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||||
Library of Congress Subject Headings (LCSH): | Germanium, Silicon, X-rays -- Diffraction, Monte Carlo method | ||||||
Journal or Publication Title: | Journal of Applied Physics | ||||||
Publisher: | American Institute of Physics | ||||||
ISSN: | 0021-8979 | ||||||
Official Date: | 14 September 2017 | ||||||
Dates: |
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Volume: | 122 | ||||||
Number: | 10 | ||||||
Article Number: | 105302 | ||||||
DOI: | 10.1063/1.4990135 | ||||||
Status: | Peer Reviewed | ||||||
Publication Status: | Published | ||||||
Access rights to Published version: | Restricted or Subscription Access | ||||||
Date of first compliant deposit: | 13 September 2017 | ||||||
Date of first compliant Open Access: | 14 September 2018 |
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