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Development of a novel 3-DOF suspension mechanism for multi-function stylus profiling systems
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Tian, Jia, Tian, Yanling, Guo, Zhiyong, Wang, Fujun, Zhang, Dawei, Liu, Xianping and Shirinzadeh, Bijian (2016) Development of a novel 3-DOF suspension mechanism for multi-function stylus profiling systems. International Journal of Precision Engineering and Manufacturing, 17 (11). pp. 1415-1423. doi:10.1007/s12541-016-0167-9 ISSN 2234-7593.
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WRAP-development-novel-suspension-mechanism-multi-function-Tian-2016.pdf - Accepted Version - Requires a PDF viewer. Download (1218Kb) | Preview |
Official URL: http://dx.doi.org/10.1007/s12541-016-0167-9
Abstract
This paper proposes a novel 3-DOF suspension mechanism for multi-function stylus profiling systems. Incorporating an electromagnetic force actuator, the 3-DOF suspension mechanism provides a controlled loading force. For reasons of the thermal and mechanical stability, a triangular flexure structure is utilized to support the stylus. The stiffness matrix method is used to establish the analytical stiffness model of the 3-DOF suspension mechanism. Considering the 3-DOF suspension mechanism as a 3-DOF lumped-mass-spring system, the dynamic model is established. Finite element analysis (FEA) is used to validate the established static and dynamic models of the 3-DOF suspension mechanism. A prototype is fabricated and experimental tests are carried out to characterize the mechanism’s performance. The results show that the 3-DOF suspension mechanism provides a controlled force in a range of up to 10 mN and has a working range in excess of 10 μm with a first natural frequency of 342 Hz in Z axis, indicating good capability for multi-function measurements at the micro/nano scale.
| Item Type: | Journal Article | ||||||
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| Subjects: | Q Science > QC Physics T Technology > TA Engineering (General). Civil engineering (General) |
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| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||||
| Library of Congress Subject Headings (LCSH): | Surfaces (Technology) -- Analysis, Surfaces (Physics) -- Analysis, Actuators -- Design and construction, Finite element method, Atomic force microscopy | ||||||
| Journal or Publication Title: | International Journal of Precision Engineering and Manufacturing | ||||||
| Publisher: | Springer | ||||||
| ISSN: | 2234-7593 | ||||||
| Official Date: | 12 November 2016 | ||||||
| Dates: |
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| Volume: | 17 | ||||||
| Number: | 11 | ||||||
| Page Range: | pp. 1415-1423 | ||||||
| DOI: | 10.1007/s12541-016-0167-9 | ||||||
| Status: | Peer Reviewed | ||||||
| Publication Status: | Published | ||||||
| Access rights to Published version: | Restricted or Subscription Access | ||||||
| Date of first compliant deposit: | 2 November 2017 | ||||||
| Date of first compliant Open Access: | 12 November 2017 | ||||||
| Funder: | Guo jia zi ran ke xue ji jin wei yuan hui (China) [National Natural Science Foundation of China] (NSFC), China. Guo jia ke xue ji shu bu [Ministry of Science and Technology] (CMST), China (Republic : 1949- ). Jiao yu bu [China. Ministry of Education] | ||||||
| Grant number: | 51420105007, 51175372, 51275337, 51205279 (NSFC), 2011ZX04016-011 (CMST), NCET-11-0374 (China (Republic : 1949- ). Jiao yu bu [China. Ministry of Education]) |
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