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Experimental investigation of the tip based micro/nano machining

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Guo, Z., Tian, Yanling, Liu, Xianping, Wang, F., Zhou, C. and Zhang, D. (2017) Experimental investigation of the tip based micro/nano machining. Applied Surface Science, 426 . pp. 406-417. doi:10.1016/j.apsusc.2017.07.181 ISSN 0169-4332.

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Official URL: http://dx.doi.org/10.1016/j.apsusc.2017.07.181

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Abstract

Based on the self-developed three dimensional micro/nano machining system, the effects of machining parameters and sample material on micro/nano machining are investigated. The micro/nano machining system is mainly composed of the probe system and micro/nano positioning stage. The former is applied to control the normal load and the latter is utilized to realize high precision motion in the xy plane. A sample examination method is firstly introduced to estimate whether the sample is placed horizontally. The machining parameters include scratching direction, speed, cycles, normal load and feed. According to the experimental results, the scratching depth is significantly affected by the normal load in all four defined scratching directions but is rarely influenced by the scratching speed. The increase of scratching cycle number can increase the scratching depth as well as smooth the groove wall. In addition, the scratching tests of silicon and copper attest that the harder material is easier to be removed. In the scratching with different feed amount, the machining results indicate that the machined depth increases as the feed reduces. Further, a cubic polynomial is used to fit the experimental results to predict the scratching depth. With the selected machining parameters of scratching direction d3/d4, scratching speed 5 μm/s and feed 0.06 μm, some more micro structures including stair, sinusoidal groove, Chinese character ‘田’, ‘TJU’ and Chinese panda have been fabricated on the silicon substrate.

Item Type: Journal Article
Subjects: T Technology > TJ Mechanical engineering and machinery
Divisions: Faculty of Science, Engineering and Medicine > Engineering > Engineering
Library of Congress Subject Headings (LCSH): Nanotechnology, Microfluidic devices, Nanomanufacturing, Atomic force microscopy, Machining
Journal or Publication Title: Applied Surface Science
Publisher: Elsevier BV
ISSN: 0169-4332
Official Date: 31 December 2017
Dates:
DateEvent
31 December 2017Published
23 July 2017Available
20 July 2017Accepted
Volume: 426
Page Range: pp. 406-417
DOI: 10.1016/j.apsusc.2017.07.181
Status: Peer Reviewed
Publication Status: Published
Access rights to Published version: Restricted or Subscription Access
Date of first compliant deposit: 2 November 2017
Date of first compliant Open Access: 23 July 2018
Funder: Guo jia zi ran ke xue ji jin wei yuan hui (China) [National Natural Science Foundation of China] (NSFC), Horizon 2020 (European Commission) (H2020)
Grant number: 51675371, 51675367, 51675376, 51405333, 51420105007 (NSFC), 644971 (H2020)

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