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Exploring hafnium oxide’s potential for passivating contacts for silicon solar cells
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Wratten, Ailish, Pain, Sophie L., Yadav, Anup, Khorani, Edris, Niewelt, Tim, Black, L., Bartholazzi, G., Walker, David, Grant, Nicholas E. and Murphy, John D. (2023) Exploring hafnium oxide’s potential for passivating contacts for silicon solar cells. Solar Energy Materials and Solar Cells, 259 . 112457. doi:10.1016/j.solmat.2023.112457 ISSN 0927-0248.
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Official URL: https://doi.org/10.1016/j.solmat.2023.112457
Abstract
We investigate the potential of ultra-thin HfO2 films grown by atomic layer deposition for passivating contacts to silicon focusing on variations in film thickness and post-deposition annealing temperature. A peak in passivation quality – as assessed by carrier lifetime measurements – is reported for 2.2 nm thick films annealed at 475 °C, for which a surface recombination velocity <1 cm/s is determined. For films <2.2 nm thick, there is a marked decrease in passivation quality. X-ray diffraction highlights a change from crystallised monoclinic to amorphous HfO2 as film thickness decreases from 12 nm to 2.2 nm. Kelvin probe results indicate that as-deposited 2.2–12 nm films have similar effective work functions, although the work function of 1 nm films is considerably lower. Upon post-deposition annealing in vacuum, all films exhibit a reduction in effective work function at temperatures coincident with the onset of passivation in air-annealed samples. An initial investigation into the contact resistivity in a passivating contact structure utilizing HfO2 reveals a strong post-deposition annealing temperature dependence, with the lowest resistance achieved below 375 °C, followed by a decrease in performance as temperature increases towards the optimal temperature for passivation (475 °C). Limitations of the contact structure used are discussed.
Item Type: | Journal Article | ||||||||||||||||||||||||
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Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering Faculty of Science, Engineering and Medicine > Science > Physics Other > Research Technology Platforms |
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Journal or Publication Title: | Solar Energy Materials and Solar Cells | ||||||||||||||||||||||||
Publisher: | Elsevier | ||||||||||||||||||||||||
ISSN: | 0927-0248 | ||||||||||||||||||||||||
Official Date: | 15 August 2023 | ||||||||||||||||||||||||
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Volume: | 259 | ||||||||||||||||||||||||
Article Number: | 112457 | ||||||||||||||||||||||||
DOI: | 10.1016/j.solmat.2023.112457 | ||||||||||||||||||||||||
Status: | Peer Reviewed | ||||||||||||||||||||||||
Publication Status: | Published | ||||||||||||||||||||||||
Access rights to Published version: | Open Access (Creative Commons) | ||||||||||||||||||||||||
Date of first compliant deposit: | 14 August 2023 | ||||||||||||||||||||||||
Date of first compliant Open Access: | 14 August 2023 | ||||||||||||||||||||||||
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